PURPOSE: To easily reduce in size of an actuator by employing an ultrasonic vibrator as driving means for applying driving force of two degrees of rotary freedoms to a movable element. CONSTITUTION: A 2-degree-of rotary freedoms actuator 1 has ultrasonic vibrators 2a, 2b and a semispherical movable element 3. The vibrators 2a, 2b are attached with a first piezoelectric unit 22 for exciting a bending vibration at an elastic unit 21 on the upper surface of the unit 21 having a rectangular flat plate shape. A second piezoelectric unit 23 for exciting a vertical vibration is attached to the side face substantially perpendicular to the attaching surface. As a result, when an electric signal of a predetermined frequency is applied to the first, second units 22, 23, the predetermined position of the unit 21 is excited substan tially by an elliptical vibration, and a driving force in the direction of an arrow A is applied to a contact surface 31. COPYRIGHT: (C)1991,JPO&Japio




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Cited By (7)

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    JP-2008245425-AOctober 09, 2008Toshiba Corp, 株式会社東芝圧電モータ及び圧電モータシステム
    JP-2012186931-ASeptember 27, 2012Konica Minolta Advanced Layers Inc, コニカミノルタアドバンストレイヤー株式会社Multiple-degree-of-freedom actuator
    JP-4550850-B2September 22, 2010株式会社東芝圧電モータシステム
    KR-100592221-B1June 26, 2006심요섭애완동물 사체 처리 시스템
    US-6637303-B2October 28, 2003Toshimichi Moriwaki, Eiji Shamoto, Makoto MatsuoElliptical vibration cutting method and elliptical vibration cutting apparatus
    US-6776563-B2August 17, 2004Eiji Shamoto, Norikazu Suzuki, Toshimichi Moriwaki, Makoto MatsuoMethod of controlling elliptical vibrator
    US-7804224-B2September 28, 2010Kabushiki Kaisha ToshibaPiezoelectric motor and piezoelectric motor system