Silicon nitride-based sintered body and production thereof

Abstract

PURPOSE: To attain high denseness at low temp. and to improve strength and oxidation resistance at high temp. by firing a molded body consisting of the oxide of a rare earth element, vanadium oxide, the oxide of an element such as Nb, Ta or Cr and silicon nitride under prescribed conditions. CONSTITUTION: Starting material consisting of 1-20wt.% oxide of a rare earth element, 0.5-8wt.% vanadium oxide, 0.5-8wt.% oxide of Nb, Ta, Cr, Mo or W and the balance silicon nitride is mixed and a molded body of this mixture is subjected to primary firing at 1,700-1,900°C under ≤10 atm pressure of a nitrogen atmosphere and secondary firing at ≥1,600°C under ≥50 atm pressure of the same nitrogen atmosphere. COPYRIGHT: (C)1991,JPO&Japio

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    JP-2010150123-AJuly 08, 2010Ngk Spark Plug Co Ltd, 日本特殊陶業株式会社窒化珪素・メリライト複合焼結体及びそれを用いた装置
    US-6274853-B1August 14, 2001Ngk Spark Plug Co., Ltd.Heating resistor, heating resistor for use in ceramic heater, and ceramic heater using the same